Perfluoroelastomer (FFKM) Seals for Aggressive Plasma, Wet Chemistry & Thermal Applications
DuPont Kalrez® Perflouroelastomer (FFKM) seals will help extend your planned maintenance intervals, and thereby lower your long-term cost of ownership, in a wide range of semiconductor processes. In customer evaluations throughout the world, Kalrez®seals exhibited improved mechanical strength, lower particle generation and longer seal life versus competitive products, in both static and dynamic sealing applications.
Service Life and Yield Improvements:
Kalrez® seals will help improve semiconductor manufacturing in a range of applications, including:
- Deposition
- Etch
- Ash/strip
- Thermal
- Wet process
DuPont™ Kalrez® Sealing Solutions
Semiconductor Processing Seals For Field-Proven Contamination Control
Purity is critical to high wafer yield, and Kalrez® perfluoroelastomer (FFKM) seals are designed with properties that help reduce contamination from particulates, outgassing, and extractables.
Kalrez® seals for semiconductor processing have been the Gold Standard since the 1970s, and DuPont continues to lead the market in performance and innovation.
Better Performance
Spansion, the largest provider of flash memory solutions, turned to DuPont Specialty Products USA for material options that would produce longer seal life with reduced particle generation. High particle count and leaks from seal erosion and compression set caused seal issues in multiple processes. Kalrez® 9100 parts exhibited significantly less seal erosion, reduced particle generation, and provided better elastic recovery characteristics.View Spansion Semiconductor O-rings Case Study
A Proven Leader
We can show numerous Case Study reports showing how users have increased performance and in-service life by upgrading from other materials to Kalrez.® For example, when the International Research Center in Belgium (IMEC) tested Kalrez® 9100 seals versus incumbent seals in an isolation valve and top nozzle position, the 9100 seals were undamaged and exhibited no sign of cracking after 5000 cycles.
These results inspired IMEC to change the perfluoroelastomer seals on all locations to
Kalrez® 9100. View the IMEC Case Study.
