Services
Trillium offers equipment repair services for primary pump, blower, and cryogenic vacuum systems. As well as temperature control and gas abatement systems.
Our customers appreciate:
- The convenience of 3 US locations in NJ, Texas and Oregon.
- Local pick-up and delivery.
- Availability of on-site field service engineers.
- Our industry-leading 18-month warranty from date of shipment.
- Confidence from technicians who undergo extensive qualification training prior to repairing your products and are regularly measured on procedural conformance.
- Sophisticated back-office systems offering weekly customer status reports so you know exactly what is happening with your equipment, and when you can expect it to be delivered.
- Customer training for primary pumps, chillers and gas abatement systems as well as general vacuum theory and applications. Each training session is customized to the customer’s specific needs and can be conducted at Trillium’s facilities or at the customer site. Trillium offers this training to further support customer success, making sure the customer is able to maximize the use of their equipment.
- ISO 9001 certification.
Repair, Exchange, and Field Services
Cryo Pump Repair
Trillium takes pride in the personal approach to customer service and support. Dedicated professionals, based in our world class manufacturing and repair facilities provide comprehensive repair services, technical support and customer service to ensure the high performance, reliability and uptime required by critical cryogenic vacuum applications. Trillium offers repair service on a range of cryopumps including CTI Helix (Brooks) CryoTorr®, and OnBoard ® pumps, as well as our own product, Cryo-Plex.
Models Serviced:
- Trillium Cryoplex®: CP8, CP8 LP, CP10, CP16
- CTI CryoTorr®: CT100, CT4, CT4F, CT7, CT8, CT8F, CT10, CT10F, CT250F, CT400, CT500
- CTI OnBoard®: OB 4, OB 4F, OB 8, OB 8F, OB 10, OB 250F, OB 400, and OB500
- CTI IS OnBoard®: IS OB 8F, IS OB 250F, IS OB 320FE

Cryo Compressor Repair
Trillium takes pride in the personal approach to customer service and support. Dedicated professionals, based in our world class manufacturing and repair facilities provide comprehensive repair services and technical support to ensure the high performance, reliability and uptime required by critical cryogenic or vacuum applications. Trillium offers repair service on a range of helium compressors including CTI, Leybold, Balzers, and Sumitomo, as well as our own M Series compressors. Trust Trillium to exceed your service and support expectations.

Dry Pump Repair
Trillium specializes in dry pump service, and we have made unparalleled investments to provide the absolute highest levels of service and support for your Edwards, Ebara and Alcatel based pumping systems.
REBUILD AND TESTING PROCESS:
Trillium takes great care to ensure each dry pump repair performs to our stringent internal standards, as well as your requirements. Highlights of the process include:
Piston Pump Repair
Trillium specializes in Piston pump service and has made unparalleled investments to provide the absolute highest levels of service and support for your Stokes, Kinney and Leybold based systems, as well as our own Univac 100, 200 and 400 pumping systems.
Rotary Vane Pump Repair
Trillium provides world-class service for your rotary vane vacuum pump. From single to two stage pumps, lab sized up to pumping speeds of 700 m3 per hour, we can service all makes and models.
Temperature Control Unit Repair
Trillium has broken the mold of traditional chiller and heat exchange repair. Instead of simply “fixing” broken units, Trillium has developed proprietary, data-based repair scopes of work specific to each make and model. This approach serves to both fix the current issue with your unit, but also perform preventative maintenance to avoid the next preventable failure from costing you downtime. If you are truly interested in “chiller up-time”, you can rely on Trillium to deliver it.







