Mass Spectrometers for Residual Gas Analysis (RGA) Applications up to 500 AMU
Residual gas analyzers (RGA) provide a unique window into the vacuum environment for contamination monitoring, leak detection and analysis of the species of interest within the vacuum chamber, water vapor for example. Hiden Analytical residual gas analyzers are high performance quadrupole mass spectrometers configured in a broad range of products to address applications in vacuum processing, science and technology.
Hiden residual gas analyzers are equipped with MAS-SOFT, which is highly intuitive and multi-level, offering simple fail-safe operation for a novice user while incorporating a broad range of useful and advanced features for the vacuum expert.
HIDEN RGAs are offered in three specification levels:
HALO – for basic residual gas analysis applications
HAL/3F – triple filter mass spectrometers for analytical applications HAL/3F PIC – pulse ion counting detection for fast event
studies.
Download Catalog