Modern semiconductor manufacturing processes continue to evolve and include the use of more and more gases requiring some form of gas abatement. Whether for protection of personnel and facilities infrastructure or to meet company or government pollution prevention mandates, there are a number of gas abatement technologies available to meet your objectives.
Trillium specializes in providing customers new and remanufactured abatement systems, on site service, and spare parts for the following types of abatement:
IES Technical Sales is your technical field sales representative for Trillium US in New England. We will work diligently to understand your application goals, and help you achieve the best possible solution. If you have questions, need some advice, or need a quotation, please give us a call or Contact Us to send a message describing your requirements, and we will respond quickly.
IES TECHNICAL SALES 250 North Street, #A-9, Danvers, MA 01923 tel: (978)777-2900 fax: (978)777-2908