HFV Series 2MHz RF Generators
The HFV-3kW and HFV-5kW have been discontinued. The recommended retrofits are:
HFV-3kW ==> Paramount 2MHz, retrofit kit PN 31550102-630
HFV-5kW ==> Paramount 2MHz, retrofit kit PN 31550102-650
MDX-L Series DC Magnetron Generators
The MDX-L Series has been discontinued. The following retrofit kits are available to replace your MDX-L 6K, MDX-L 12K, and MDX-L 18K DC power supplies with the new Pinnacle III Series. There are some minor dimensional changes. Retrofit benefits are:
* higher uptime
* lower maintenance costs
* extended process development and control
* extended tool lifetimes
Obsolete MDX-L 6K part numbers:
3152280-000
3152317-000
3152344-104
Replacement Kit part number:
3176000-606 (includes Pinnacle III, input line cord, rack ear extensions, hardware)
Obsolete MDX-L 12K part numbers:
3152272-000, 3152272-001, 3152272-002, 3152272-004
3152313-000, 001, -002, -004, -007, -013, -014, -015
3152344-100, 3152344-105, 3152344-106, 3152344-200, 3152344-201
3152410-001, 3152410-100
Replacement Kit part number:
3176000-012 (includes Pinnacle III, input line cord, rack ear extensions, hardware)
Obsolete MDX-L 18K part numbers:
3152281-000, 3152281-001
3152319-001, 3152319-002
3152345-100
3152409-001, 3152409-100
Replacement Kit part number:
3176000-018 (includes Pinnacle III, input line cord, rack ear extensions, hardware)
RFG Series 13.56 MHz RF Generators
The RFG-1250, RFDS-1250, RFG-3002 and RFG-5500 power supplies have been discontinued. Retrofit kits built around AE’s flagship RF platform, Paramount®, are available. Retrofit benefits are:
* Higher accuracy: 2% vs. 4%
* Excellent repeatability: +/- 0.5%
* Semi F47 compliant
Obsolete RFG-1250 part numbers:
3155027-003, -3155027-004, 3155027-008, 3155027-009, 3155027-028
Replacement Paramount Kit part number:
3171250-xxx (Contact Us for a quote or more information)
Obsolete RFDS-1250 part numbers:
3155059-000, 3155059-001, 3155059-002, 3155059-026
Replacement Paramount Kit part number:
3171250-005
Obsolete RFG-3000, RFG-3001, RFG-3002 part numbers:
3155038-005, 3155089-010
Replacement Paramount 1250 Kit PN: (Contact Us for a quote or more info)
Obsolete RFG-5500 part numbers:
3155051-010, 3155051-015, 3155051-115
Replacement Paramount 5.5kW Kit part number:
3175000-005