For real-time thin film thickness and deposition rate control, quartz crystal (QCM) controllers are very reliable and time tested technology. Telemark supplies complete quartz crystal measuring systems to meet our customers’ demands. Telemark 800 series units come complete with oscillator, cables and hand-held remote.
861 Quartz Crystal Deposition Controller
861 Quartz Crystal Deposition Controller
The NEW Telemark 861 electron beam source quartz crystal (QCM) deposition controller is a drop-in replacement for the Maxtek 360 and Telemark 860 units. This controller provides pin for pin replacement for old Maxtek and Telemark units. Users can transfer existing processes and setup configurations from old units directly to the 861. The 861 is also an excellent replacement for the IC6, IC5, XTC3, XTC2, SQC-310 and IC6000.
Modern color LCD touch screen interface and capability for I/O upgrades and additional sensor heads makes this tool excellent for system upgrades and OEM users alike.
The unit contains an extensive material library and user definable materials. Storage capability of 99 processes of up to 999 layers each.
Proprietary oscillator for 5MHZ or 6MHz operation and high resolution of < 0.01A
Units come standard with 2 sensor inputs (upgradable to 4 sensors) and and 8 I/O channels (upgradable to 32 I/O channels) which can be used for ancillary system operations such as pocket indexing, shutter activation, and sweep selection.
High frequency internal reference oscillator provides <0.01A resolution for aluminum
Operates with 5 MHz or 6 MHz crystals
All new innovative crystal oscillator design for outstanding stability and noise immunity
Extensive materials library, also allowing for user definable materials
Color LCD touch screen for graphical and numerical display of primary real-time process data, providing an intuitive and user-friendly operator interface
Touch screen capabilities: In-process parameter modification, Process and Layer editor, I/O status and control
Real time graphical display of Power v/s time, Rate v/s time, Thickness v/s time, Rate deviation v/s time
All system, film and setup files may be saved via a front panel USB port, as well as uploaded to instrument
Can accommodate up to 99 processes of 999 layers each
Standard unit has 2 crystal sensor inputs and 2 isolated rate control analog output drivers, expandable to 4 each.
8 relay isolated outputs and 8 optically isolated inputs (active or passive mode), with the option to upgrade to 32 ea., for ancillary operations such as pocket indexing, sweep selection, and sensor selection.
The Model 880 quartz crystals (QCM) deposition controller is based on a multi-microprocessor design, which enables rapid measurement updates with superior resolution. It features an LCD touch screen for programming and displaying process data and graphs, as well as modular architecture. The unit has four slots for I/O cards; each slot can house either an input card (8 opto-isolated inputs) or an output card (8 SPDT relays). The sensor-head/source control modules provide two channels each for crystal frequency measurement and two separate, isolated analog 0-10 VDC (+ and – polarity) outputs for source control or recorders. The 880 can house four such modules, supporting up to eight channels of sensor input and 8 analog outputs, and enabling averaging between several sensor crystals.
Advanced measurement technique provides high accuracy at a constant 100ms measurement period
Versatile film sequencing and process control
Extremely flexible programmable Input/Output structure (including pulsed signals, counters and timers) for versatile system control
Multi-film and multi-process storage with up to 99 materials
Multi-processor design allows module expansion while maintaining high performance in all configurations
Two sensor inputs standard (6 additional sensor inputs – optional), 2 source analog outputs (6 additional configurable analog outputs – optional)
RS-232C standard (Telemark protocol or ASCII)
Weighted averaging of up to eight sensors for precise large area depositions
Large format numeric and graphic display with touch panel user interface
Optional removable memory module for process parameter storage and transfer
Expandable I/O up to 32 inputs or outputs (in groups of 8 each) with programmable logic I/O structure
Four user definable front panel buttons and indicators for use with programmable logic I/O structure
The NEW Telemark 851 Quartz Crystal (QCM) Thickness Monitor
Modern color LCD touch screen interface and capability for I/O upgrades and additional sensor heads makes this tool excellent for system upgrades and OEM users alike.
The unit contains an extensive material library and user definable materials.
Proprietary oscillator for 5MHZ or 6MHz operation and high resolution of < 0.01A
Unit comes standard with 2 sensor inputs.
High frequency internal reference oscillator provides <0.01A resolution for aluminum
Operates with 5 MHz or 6 MHz crystals
All new innovative crystal oscillator design for outstanding stability and noise immunity
Extensive materials library, also allowing for user definable materials
Color LCD touch screen for graphical and numerical display of primary real-time process data, providing an intuitive and user friendly operator interface
Touch screen capabilities: In-process parameter modification, I/O status and control, Real time graphical display of: Rate v/s time and Thickness v/s time
All system, film and setup files may be saved via a front panel USB port, as well as uploaded to instrument
Can accommodate up to 99 materials
2 crystal sensor inputs included
2 isolated DAC analog outputs of Rate and Thickness for chart recorders
