1. Home
  2. /
  3. Suppliers
  4. /
  5. Kashiyama USA
  6. /
  7. SDE Series

SDE Series

Ideal for Harsh Process Applications

SDE Series

SDE Series

The SDE Series by Kashiyama is designed for large capacity applications (120,000 SLPM and up). The advanced vertical screw design provides outstanding reliability for harsh duty applications.

SDE Series Features

  • Available up to 200kL/min.
  • Best for large wafer and FPD.
  • Durable to various processes.

Major Products

Spec. / Products *1 SDE1220 SDE20M20 SDE30M20 SDE4060 SDE4030M20 SDE8060 SDE804060
Max. pumping speed
[L/min] *2		 20,000 30,000 50,000 60,000 80,000 120,000 190,000
Ultimate pressure
[Pa] *2		 0.5 0.8 0.5 0.8 0.5
Supply voltage
(50/60Hz)		 3Phase AC200～220V, 380～480V
Dimensions [mm] W*H*L *3 W:400
H:780
L:930		 W:450
H:950
L:1000		 W:450
H:950
L:1000		 W:750
H:1200
L:1600		 W:800
H:1580
L:1320		 W:850
H:1220
L:1600		 W:1000
H:1980
L:1850

*1) Smaller than 20,000L/min pumps are also available.  *2) Without N2 purge. *3) Package size.  dimensions vary by specification.

S-P Curve 

SDE Graph

*S-P curves vary by combination.

Downloads:

DownLoad catalog

Show more
Show less