1. Home
  2. /
  3. Suppliers
  4. /
  5. Kashiyama USA
  6. /
  7. MU Series

MU Series

Power Consumption 0.35kW | Extremely Small Footprint

Kashiyama MU SeriesMU Series

The MU Series is the industry’s smallest load-lock and process pump with the lowest power consumption in its class. Superior pumping performance with low vibration and an extremely compact design and is suitable for load-locks, transfer chambers, and light process applications.

MU-X Series Features

  • Roots dry pump achieved smallest energy consumption & footprint in the category.
  • Applicable for various tools.
  • Best for clean pumping such as L/L and transfer chamber, etc.

Major Products

Spec. / Products MU100X MU180X MU300X MU600X MU1200X MU20M18X
Max. pumping speed
[L/min] *1		 1,660 3,000 5,000 10,000 20,000 30,000
Ultimate pressure
[Pa] *1		 1.5 0.5
Supply voltage
(50/60Hz)		 3Phase AC200～220V *2
Power consumption
[kW] *3		 0.35 0.5 0.55 0.6 0.7 1.5
Dimensions [mm] W*H*L *4 W:230
H:275
L:450		 W:280
H:299
L:550		 W:230
H:520
L:450		 W:230
H:520
L:530		 W:275
H:580
L:625		 W:500
H:950
L:1100
Mass [kg] 60 95 100 120 165 340
  1. * Without N2 purge.
  2. * Contact us for other voltage options.
  3. * Approx. value at ultimate pressure.
  4. * Package size.
    * Contact us about large capacity pumps.

S-P Curve

*S-P curves vary by combination.

Downloads:

DownLoad Catalog

Show more
Show less