Advanced Energy DC Power Systems
A leader in DC power products for 36 years, AE has serviced thousands of customers worldwide to profitably enable complex
processes through:
- High yields
- Target life and utilization improvements
- Greater system up-time
- Applications support staff
- Global support capability
Mainly used with physical vapor deposition (PVD) processes—both complex metallic sputtering and in combination with a reactive gas to form thin-film dielectric layers—AE’s DC power products have been used in varied manufacturing markets, including:
- Semiconductor (copper, aluminum, tantalum, titanium, and newer exotic materials)
- Flat panel display (thin-film transistor, color filter, organic LEDs)
- Data storage (optical storage, magnetic storage, and combinations of magneto-optical storage)
- Solar photovoltaic cell (transparent conductive oxides and Si deposition)
- Architectural glass
- Advanced product applications (thin films for optics, tool coating, plastics, etc.)
Downloads:
Precision Optical Temperature Measurement Pyrometers & SCR Power Controllers brochure
AE High Voltage Products Brochure
Mission-Critical High Voltage Components for Mass Spectrometry Systems
Precision Power Product Guide
Products
Ascent AP (Advanced Pulsing) Power Supplies
AE Advances Plasma Control Innovation for Precision Sputtering
AE’s Ascent® DMS accessory introduced landmark
power precision and control, enabling advanced dual-magnetron sputtering process and cost-of-ownership benefits. Now, the Ascent AP power supply extends these industry-leading capabilities into precision single-magnetron metallic and reactive sputtering processes. With patented pulsing technology, the convenient single-box Ascent AP solution proactively inhibits arcs, and its wide operational range unlocks a range of material options to extend process flexibility and material innovation.
Ascent AMS DC Power Supplies – 30, 40, and 60 kW
Industry-leading arc management—stable power delivery through extreme arc conditions, for highly repeatable films
As manufacturing techniques advance, new materials and cathode designs pose greater challenges to process stability and film repeatability. Ascent® AMS power supplies deliver stable, repeatable power, regardless of process material or cathode design. Please also see Ascent DMS Advanced Dual-Magnetron Sputtering Accessories.
Pinnacle Series
The field-proven Pinnacle® platform of DC power supplies delivers remarkable process consistency and control for significantly reduced variation and higher yields. This compact, versatile package offers the lowest stored energy, fastest arc response, and widest full-power operational impedance range in the industry.
Pinnacle Plus+ Pulsed-DC Power Supplies
The Advanced Energy® (AE) Pinnacle® Plus+ power supply provides all of the advantages of a pulsed-DC solution for your reactive processes—in a one-box package that delivers additional benefits in the form of ease of use, cost savings, and superior flexibility. Combining standard DC technology and process-proven pulsed-DC technology patented by AE in the 1990s, the Pinnacle Plus+ power supply provides higher deposition rates, more repeatable performance, and exceptional film quality compared to complicated and expensive AC-power solutions. The Pinnacle Plus+ product line consists of single-output 5 kW and 10 kW models, as well as a dual output 5 kW model.
Pinnacle 3000 DC Power Supplies
The Advanced Energy® (AE) Pinnacle® Plus+ power supply provides all of the advantages of a pulsed-DC solution for your reactive processes—in a one-box package that delivers additional benefits in the form of ease of use, cost savings, and superior flexibility. Combining standard DC technology and process-proven pulsed-DC technology patented by AE in the 1990s, the Pinnacle Plus+ power supply provides higher deposition rates, more repeatable performance, and exceptional film quality compared to complicated and expensive AC-power solutions. The Pinnacle Plus+ product line consists of single-output 5 kW and 10 kW models, as well as a dual output 5 kW model.
Pinnacle Diamond DC Power Supplies
In both process and bias applications, the Pinnacle® Diamond™ DC power supply provides the highest efficiency and power factor available, resulting in the lowest operating and installed cost in the industry. Remarkable Pinnacle process consistency and control deliver the additional benefits of significantly reduced variation and higher yields—all from one exceptionally compact unit.
MDX Series 500 W DC Power Supply
The MDX 500 is intended for continuous hard use in a vacuum environment, providing multi-level suppression and quenching of different types of arcs in the magnetron environment. It is a leading performer in basic magnetron sputtering, DC sputtering with RF bias, and DC-biased RF sputtering.
Its small size makes it well suited for laboratory systems and small-scale production environments.
MDX 1 kW & 1.5 kW
Tight regulation, superior arc quenching, and low stored output energy make MDX Series DC power supplies an industry leader. Intended for continuous hard use in a vacuum environment, these rugged power supplies are most commonly used as DC magnetron sputtering drives. They also offer tight regulation as bias supplies in RF sputtering and etching systems. Their compact design makes them the primary choice for laboratory systems.
Solvix Series
Advanced Energy®, the world leader in power conversion technology, presents Solvix® DC
and pulsed-DC power supplies for sputtering and cathodic arc deposition applications. This series provides precise control and proven reliability with over a decade in the field—backed by AE’s worldwide support network. Offering a wide range of power and frequency levels, pulsing, and multiple communications options, Solvix power supplies provide a rugged and cost-effective solution for your unique process.
PVD Solvix® 3 to 40 kW DC and Pulsed-DC Power Supplies for Metallic and Reactive Sputtering Applications