“Kalrez®” was the first high performance perfluoroelastomer designed for plasma, high temperature, and wet process applications, and was introduced in the 1970s. Many users think of Kalrez® in a similar way we have all come to think of “Kleenex®” – that is – as a generic product and just about any type of Kalrez® will be OK. However, there are now many versions (“compounds”) of Kalrez® based on the intended application, and the differences are substantial.
The table below is a great starting point, focusing on semiconductor applications. Keep in mind, though, that because perfluoelastomers are considerably more expensive than standard fluoroelastomers such as Viton®, and different compounds are priced at different levels, you may not always have to choose the best match for your application – your needs can often be fully met by choosing an acceptable alternate with a lower price.
| Application | First Recommendation Alternate Recommendation(s) |
| Plasma: PE-CVD, PE-ALD, HDC-CVD | Kalrez® 9100 Kalrez® 9300, 9500, or 9600 |
| Plasma: SA-CVD, F-CVD | Kalrez® 9500 Kalrez® 9300, or 9600 |
| Plasma: Ash, Strip | Kalrez® 8002 Kalrez® 9300, 9500, or 9600 |
| Plasma: Conductor Etch | Kalrez® 9100 Kalrez® 8575, 9300, 9500, or 9600 |
| Plasma: Dielectric Etch | Kalrez® 9300 Kalrez® 5700, 9300, 9500, or 9600 |
| Thermal: Oxidation, Diffusion, ALD, LP-CVD | Kalrez® 8900 Kalrez® 7075UP |
| Thermal: Metal CVD | Kalrez® 7075UP Kalrez® 8900 |
| Thermal: Lamp Annealing, RTP | Kalrez® 8575 |
| Wet Processes | Kalrez® 6375UP |
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