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Plasma Power Products

Advanced Energy is the leading global provider of precision power products used in fabrication processes for semiconductor, flat panel display, data storage products, solar cells, architectural glass, and other advanced product applications.

Benefits of Using AE Power Products

Advanced Energy has led the precision thin film power products market since 1981. AE supports  thousands of customers worldwide, enabling complex processes through:

  • Higher yields
  • Increased target life and utilization
  • Greater system up-time

Advanced Energy products deliver:

  • Unrivaled plasma power precision and control
  • Excellent arc management
  • Cutting-edge RF match technology
  • Integrated, field-proven solutions

If you are sputtering, please review our power supply selection matrix:

DC Power

DC Power

DC Power Products

  • Ascent® and Ascent® AMS 30kW, 40kW, 60kW
  • Ascent® DMS Dual Magnetron Sputtering Accessory
  • *NEW: Ascent® SMS and DMS 15kW, 30kW Pulsing
  • Solvix 6kW, 10kW, 15kW, 20kW, 10x10kW, 15x15kW
  • Solvix Bias 3kW, 6kW, 10kW, 15kW, 30kW
  • Solvix Pulsing 3kW, 5kW, 10kW, 20kW, 30kW
  • Pinnacle 6kW, 10kW, 12kW, 20kW, 6x6kW, 10x10kW
  • Pinnacle Plus 1.5kW, 5kW, 10kW, 1x1kW, 5x5kW Pulsed DC
  • Pinnacle 3000 3kW
  • Pinnacle Diamond 8kW, 12kW
  • MDX 500W, 1kW, 1.5kW
  • SPARC-LE, SPARC-LE V, SPARC II Pulsing Accessories

* In 2013, AE disrupted the dual-magnetron sputtering paradigm by introducing the Ascent Series with bipolar pulsed-DC technology, providing unprecedented plasma control where only limited control previously existed.

Mainly used with physical vapor deposition (PVD) processes—both complex metallic sputtering and in combination with a reactive gas to form thin-film dielectric layers, AE’s DC power products have been used in varied manufacturing markets, including:

  • Semiconductor (Cu, Al, Ta, Ti, and newer exotic materials)
  • Optical thin films
  • Flat panel display (thin-film transistor, color filter, organic LEDs)
  • Data storage (optical storage, magnetic storage, and combinations of magneto-optical storage)
  • Solar photovoltaic cell (transparent conductive oxides and Si deposition)
  • Architectural glass
  • Industrial applications e.g. tool coating, decorative coating, plastics …)
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AC Power

AC Power

Low- and mid-frequency power supplies offer highly efficient, easy-to-integrate power for improved process control in a wide variety of applications.

AC Power Products

  • Paramount Mid-Frequency, 3kW, 5kW, 8kW
  • Ascent® DMS Dual Magnetron Sputtering Accessory
  • PDX Mid-Frequency, 900W, 1.25kW
  • PE-II Low Frequency
  • LFGS Variable Frequency, 1.25kW, 2.5kW
  • Crystal High Power Low Frequency, 60kW to 180kW

RF Power

RF Power Products

  • Paramount Power Supplies, 2 to 60 MHz, 1.25kW to 15kW
  • APEX Power Supplies, 13.56 MHz, 1.5kW, 2kW, 3kW, 5.5kW, 10kW
  • CESAR Power Supplies, 2 to 60 MHz, 300W to 5kW
  • Navigator Digital RF Matching Networks
  • NAVIO Digital/Analog RF Matching Networks
  • VM Analog Matching Networks
  • Z’Scan RF Plasma Impedance Instrument
  • GenCal RP Power Measurement Instrument

Advanced Energy Power Control

Applications for Advanced Energy Power Control:

  • Industrial Thin Film Coating
  • Vacuum Heat Treating
  • Semiconductor Processing
  • Thermal Spray Coating
  • Power Generation
  • Fuel Processing

DISCONTINUED Power Products (contact us for help or more information)

  • E-Chuck
  • FTMS Match Series
  • LF Series Generators
  • MDX Power Supplies 2.5 to 80kW (500W, 1kW, 1.5kW still available)
  • MDX II Series
  • MDX-L Series
  • Mercury 1013 and 10013 Matching Networks
  • MSD 350 Generators
  • PE Series Generators (PE-II still available)
  • Pulsar Pulsing Accessory

We’re here to help …
Here at IES we work diligently to understand your application goals, and help you achieve the best possible solution. Have questions or need some advice? Give us a call, or click the link below to send a message describing your requirements and we will respond quickly.